Annual Report 2001 - Cornell University
003 Selected Faculty Research

18 Creating Nanobumps

Stephen Sass, Materials Science and Engineering, and Melissa Hines, Chemistry and Chemical Biology, discovered a new etching process for producing silicon structures as small as 10 nanometers. The process, controlled etching of dislocations (CED), made an array of features on a silicon surface which the researchers called "nanobumps." They were columns 25 nanometers across (about 75 atoms) and six times smaller than the width of the smallest component of a commercial microprocessor. Optical lithography, used by the microelectronics industry to make microscopic devices such as computer circuitry, has not been able to produce features smaller than 150 nanometers in width. This new process has potential for manufacturing structures at the scale of biologically important molecules, such as human antibodies, and for developing a range of devices from biological sensors to light-emitting silicon displays.

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© 2002 by the Office of the Vice Provost for Research [OVPR], Cornell University.

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